ENTEGRIS INC — Form 10-Q

Entegris filed three template equity award agreements under its 2020 Stock Plan: Global RSU Awards (restricted stock units with multi-year vesting), FCF Performance Share Units (2026–2028 performance period, free cash flow margin–based earning with 0–200% multiplier), and TSR Performance Share Units (2026–2028 performance period, total shareholder return vs. Philadelphia Semiconductor Index peers with 0–200% multiplier, capped at target if absolute TSR negative). No specific grant amounts, recipient names, or dollar values disclosed—these are boilerplate plan documents with blank placeholders for individual awards. Standard change-of-control, retirement, death/disability, and clawback provisions apply.